Inventor
NAG SOMNATH S
US9 patents
Patents
9 patentsUS6313010B1Nov 6, 2001
Integrated circuit insulator and method
TEXAS INSTRUMENTS INC62 citations96
US6204200B1Mar 20, 2001
Process scheme to form controlled airgaps between interconnect lines to reduce capacitance
TEXAS INSTRUMENTS INC304 citations93
US6306725B1Oct 23, 2001
In-situ liner for isolation trench side walls and method
TEXAS INSTRUMENTS INC19 citations92
US6297125B1Oct 2, 2001
Air-bridge integration scheme for reducing interconnect delay
TEXAS INSTRUMENTS INC52 citations92
US6127285AOct 3, 2000
Interlevel dielectrics with reduced dielectric constant
TEXAS INSTRUMENTS INC39 citations91
US6268297B1Jul 31, 2001
Self-planarizing low-temperature doped-silicate-glass process capable of gap-filling narrow spaces
TEXAS INSTRUMENTS INC18 citations83
US6143625ANov 7, 2000
Protective liner for isolation trench side walls and method
TEXAS INSTRUMENTS INC15 citations73
US6962883B2Nov 8, 2005
Integrated circuit insulator and method
TEXAS INSTRUMENTS INC4 citations62
US6424040B1Jul 23, 2002
Integration of fluorinated dielectrics in multi-level metallizations
TEXAS INSTRUMENTS INC0 citations52