Inventor

FAURE THOMAS BENJAMIN

US3 patents

Patents

3 patents

US6436605B1Aug 20, 2002

Plasma resistant composition and use thereof

IBM31 citations92

US5783309AJul 21, 1998

Recovery of an anodically bonded glass device from a substrate by use of a metal interlayer

IBM32 citations89

US7014958B2Mar 21, 2006

Method for dry etching photomask material

IBM2 citations60