Inventor
BREINER LYLE
US5 patents
Patents
5 patentsUS6551893B1Apr 22, 2003
Atomic layer deposition of capacitor dielectric
MICRON TECHNOLOGY INC172 citations98
US6298470B1Oct 2, 2001
Method for efficient manufacturing of integrated circuits
MICRON TECHNOLOGY INC133 citations98
US7049244B2May 23, 2006
Method for enhancing silicon dioxide to silicon nitride selectivity
MICRON TECHNOLOGY INC63 citations97
US6526547B2Feb 25, 2003
Method for efficient manufacturing of integrated circuits
MICRON TECHNOLOGY INC66 citations95
US6458714B1Oct 1, 2002
Method of selective oxidation in semiconductor manufacture
MICRON TECHNOLOGY INC53 citations93