Inventor
KOIDE TOMOAKI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “KOIDE TOMOAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ANELVA CORP
4 patentsUS5993679ANov 30, 1999
Method of cleaning metallic films built up within thin film deposition apparatus
ANELVA CORP48 citations89
US6562219B2May 13, 2003
Method for the formation of copper wiring films
ANELVA CORP7 citations72
US5961776AOct 5, 1999
Surface processing apparatus
ANELVA CORP15 citations72
US6887522B2May 3, 2005
Method for forming a copper thin film
ANELVA CORP2 citations61