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Inventor
XIAO SHIQIN
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “XIAO SHIQIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
1 patent
US6998303B2
Feb 14, 2006
Manufacture method for semiconductor device with patterned film of ZrO2 or the like
FUJITSU LTD
12 citations
81
ANELVA CORP
1 patent
US6562219B2
May 13, 2003
Method for the formation of copper wiring films
ANELVA CORP
7 citations
72
FUJITSU MICROELECTRONICS LTD
1 patent
US7563729B2
Jul 21, 2009
Method of forming a dielectric film
FUJITSU MICROELECTRONICS LTD
3 citations
59