Inventor
AKAGAWA MASAYUKI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “AKAGAWA MASAYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
5 patentsUS4856904AAug 15, 1989
Wafer inspecting apparatus
NIKON CORP142 citations96
US6288769B1Sep 11, 2001
Optical device method of cleaning the same, projection aligner, and method of producing the same
NIKON CORP70 citations94
US6762412B1Jul 13, 2004
Optical apparatus, exposure apparatus using the same, and gas introduction method
NIKON CORP15 citations81
US5888327AMar 30, 1999
Pellicle pasting system and method
NIKON CORP12 citations73
US6671033B2Dec 30, 2003
Optical device, method of cleaning the same, projection aligner, and method of producing the same
NIKON CORP11 citations72