Inventor
TANIUCHI TAICHI
JP4 patents
Patents
4 patentsUS6288769B1Sep 11, 2001
Optical device method of cleaning the same, projection aligner, and method of producing the same
NIKON CORP70 citations94
US6727981B2Apr 27, 2004
Illuminating optical apparatus and making method thereof, exposure apparatus and making method thereof, and device manufacturing method
NIKON CORP20 citations88
US6762412B1Jul 13, 2004
Optical apparatus, exposure apparatus using the same, and gas introduction method
NIKON CORP15 citations81
US6671033B2Dec 30, 2003
Optical device, method of cleaning the same, projection aligner, and method of producing the same
NIKON CORP11 citations72