Inventor
NAM HAE-YOUNG
KR3 patents
Patents
3 patentsUS6933360B2Aug 23, 2005
Organosilicate polymer and insulating film therefrom
LG CHEMICAL LTD9 citations72
US7091287B2Aug 15, 2006
Nanopore forming material for forming insulating film for semiconductors and low dielectric insulating film comprising the same
LG CHEMICAL LTD6 citations61
US7238627B2Jul 3, 2007
Organosilicate polymer and insulating film therefrom
LG CHEMICAL LTD0 citations51