Inventor
MONSHOUWER RENE
NL10 patents
⚠️ This page may combine multiple inventors who share the name “MONSHOUWER RENE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
9 patentsUS6937344B2Aug 30, 2005
Method of measuring overlay
ASML NETHERLANDS BV36 citations92
US6937334B2Aug 30, 2005
Method of measuring alignment of a substrate with respect to a reference alignment mark
ASML NETHERLANDS BV29 citations92
US7277185B2Oct 2, 2007
Method of measuring overlay
ASML NETHERLANDS BV12 citations83
US7633618B2Dec 15, 2009
Method and apparatus for measuring the relative position of a first and a second alignment mark
ASML NETHERLANDS BV18 citations82
US7345739B2Mar 18, 2008
Lithographic alignment system and device manufacturing method
ASML NETHERLANDS BV8 citations73
US7095499B2Aug 22, 2006
Method of measuring alignment of a substrate with respect to a reference alignment mark
ASML NETHERLANDS BV4 citations62
US6803993B2Oct 12, 2004
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations62
US7476490B2Jan 13, 2009
Method for producing a marker on a substrate, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US7312846B2Dec 25, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51