Inventor

ZALM PETER CORNELIS

NL3 patents

⚠️ This page may combine multiple inventors who share the name “ZALM PETER CORNELIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BANINE VADIM YEVGENYEVICH

2 patents

US8217347B2Jul 10, 2012

System and method for detecting at least one contamination species in a lithographic apparatus

BANINE VADIM YEVGENYEVICH3 citations61

US8445873B2May 21, 2013

System and method for detecting at least one contamination species in a lithographic apparatus

BANINE VADIM YEVGENYEVICH0 citations51

ASML NETHERLANDS BV

1 patent

US7897110B2Mar 1, 2011

System and method for detecting at least one contamination species in a lithographic apparatus

ASML NETHERLANDS BV5 citations72