Inventor

ZIN KELVIN KYAW

US2 patents

⚠️ This page may combine multiple inventors who share the name “ZIN KELVIN KYAW”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZIN KELVIN KYAW

1 patent

US8809196B2Aug 19, 2014

Method of etching a thin film using pressure modulation

ZIN KELVIN KYAW4 citations54

TOKYO ELECTRON LTD

1 patent

US7622390B2Nov 24, 2009

Method for treating a dielectric film to reduce damage

TOKYO ELECTRON LTD0 citations45