Inventor
SUN CHIH-HUNG
TW9 patents
⚠️ This page may combine multiple inventors who share the name “SUN CHIH-HUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
5 patentsUS9881834B1Jan 30, 2018
Contact openings and methods forming same
TAIWAN SEMICONDUCTOR MFG CO LTD14 citations91
US12439624B2Oct 7, 2025
Method of manufacturing semiconductor devices including forming an air gap based on removing a recessed sacrificial layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10978341B2Apr 13, 2021
Contact openings and methods forming same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US9236294B2Jan 12, 2016
Method for forming semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations52
US10510593B2Dec 17, 2019
Contact openings and methods forming same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
TAIWAN SEMICONDUCTOR MFG
3 patentsUS9373581B2Jun 21, 2016
Interconnect structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG0 citations51
US9269614B2Feb 23, 2016
Method of forming semiconductor device using remote plasma treatment
TAIWAN SEMICONDUCTOR MFG1 citations51
US8993442B2Mar 31, 2015
Interconnect structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG1 citations51