Inventor
WILSON ERIC D
US8 patents
⚠️ This page may combine multiple inventors who share the name “WILSON ERIC D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
3 patentsUS10825645B2Nov 3, 2020
System and method for reduced workpiece adhesion due to electrostatic charge during removal from a processing station
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations72
US10431421B2Oct 1, 2019
Apparatus and techniques for beam mapping in ion beam system
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations54
US9817407B2Nov 14, 2017
System and method of opening a load lock door valve at a desired pressure after venting
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations45