Inventor
STARIK SERGEY
UA10 patents
⚠️ This page may combine multiple inventors who share the name “STARIK SERGEY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS9157730B2Oct 13, 2015
PECVD process
APPLIED MATERIALS INC49 citations97
US9816187B2Nov 14, 2017
PECVD process
APPLIED MATERIALS INC8 citations92
US9458537B2Oct 4, 2016
PECVD process
APPLIED MATERIALS INC12 citations92
US10793954B2Oct 6, 2020
PECVD process
APPLIED MATERIALS INC3 citations84
US10060032B2Aug 28, 2018
PECVD process
APPLIED MATERIALS INC3 citations84
US11613812B2Mar 28, 2023
PECVD process
APPLIED MATERIALS INC2 citations73
US11898249B2Feb 13, 2024
PECVD process
APPLIED MATERIALS INC0 citations62
US10030306B2Jul 24, 2018
PECVD apparatus and process
APPLIED MATERIALS INC1 citations62
US9490154B2Nov 8, 2016
Method of aligning substrate-scale mask with substrate
APPLIED MATERIALS INC1 citations51