Inventor
DANESHPANAH MOHAMMAD MEHDI
US5 patents
⚠️ This page may combine multiple inventors who share the name “DANESHPANAH MOHAMMAD MEHDI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
3 patentsUS10395361B2Aug 27, 2019
Apparatus and methods for inspecting reticles
KLA TENCOR CORP4 citations71
US9311700B2Apr 12, 2016
Model-based registration and critical dimension metrology
KLA TENCOR CORP3 citations71
US11156927B1Oct 26, 2021
System and method for switching between an EUV pellicle and an optical pellicle
KLA TENCOR CORP0 citations47