Inventor
HSIEH JU-RU
TW9 patents
Patents
9 patentsUS9899210B2Feb 20, 2018
Chemical vapor deposition apparatus and method for manufacturing semiconductor device using the same
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations70
US12068317B2Aug 20, 2024
Integrated circuit with anti-punch through control
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US12014987B2Jun 18, 2024
Electro-migration reduction
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11450609B2Sep 20, 2022
Electro-migration reduction
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations58
US11315921B2Apr 26, 2022
Integrated circuit with anti-punch through control
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US12218129B2Feb 4, 2025
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations53
US11721694B2Aug 8, 2023
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations53
US10475643B2Nov 12, 2019
Deposition apparatus and method for manufacturing semiconductor device using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US10522369B2Dec 31, 2019
Method and system for cleaning wafer and scrubber
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations30