Inventor

LEE YUNG-YAO

TW64 patents

⚠️ This page may combine multiple inventors who share the name “LEE YUNG-YAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LEE YUNG-YAO

TAIWAN SEMICONDUCTOR MFG CO LTD

Synchronized integrated metrology for overlay-shift reduction

Extractor piping on outermost sidewall of immersion hood apparatus

Semiconductor manufacturing method and apparatus thereof

Apparatus and methods for chemical mechanical polishing

Lithographic overlay sampling

Method and system of surface topography measurement for lithography

Method and system of surface topography measurement for lithography

Optical module structure

Exposure method and exposure apparatus

Method of manufacturing a semiconductor structure

Method for spin-coating a layer on a semiconductor wafer

Extractor piping on outermost sidewall of immersion hood apparatus

Overlay sampling methodology

Immersion exposure tool

Semiconductor structure and manufacturing method thereof

Semiconductor wafer cooling

Method of using wafer stage

Wafer stage and method of using

Immersion exposure tool

Semiconductor wafer cooling

Semiconductor manufacturing method and apparatus thereof

Immersion lithography system and method of using

Semiconductor structure and manufacturing method thereof

Semiconductor developer tool and methods of operation

Method of manufacturing semiconductor structure

Method and system of surface topography measurement for lithography

Resist pump buffer tank and method of resist defect reduction

Method of operating drippage prevention system

Resist pump buffer tank and method of resist defect reduction

Semiconductor developer tool and methods of operation

Exposure method and exposure apparatus

Method of manufacturing semiconductor structure

Semiconductor apparatus and method for baking coating layer

Apparatus for forming a photoresist layer, method for forming a masking layer, and method for forming a photoresist layer

Apparatus for dispensing liquid material and method for fabricating semiconductor device

Drainage for temperature and humidity controlling system

Drippage prevention system and method of operating same

Apparatus for dispensing liquid material and method for fabricating semiconductor device

Lithographic overlay correction and lithographic process

Lithographic overlay correction and lithographic process

Method for forming layer

Apparatus for physical vapor deposition and method for forming a layer

Exhaust system and method of using

Method for improving exposure performance and apparatus thereof

Method for layoutless overlay control

Overlay sampling methodology

LEE YUNG-YAO

Lithography process

Method of determining overlay error and control system for dynamic control of reticle position

Tool induced shift reduction determination for overlay metrology

LAING CHE-RONG

Defect monitoring for resist layer