Inventor
HSU CHEN YI
TW15 patents
⚠️ This page may combine multiple inventors who share the name “HSU CHEN YI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
14 patentsUS12581897B2Mar 17, 2026
Liquid storage for facility chemical supply system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11769678B2Sep 26, 2023
Liquid storage for facility chemical supply system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12235582B2Feb 25, 2025
Semiconductor developer tool and methods of operation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12191146B2Jan 7, 2025
Method of manufacturing semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12130553B2Oct 29, 2024
Resist pump buffer tank and method of resist defect reduction
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11835861B2Dec 5, 2023
Resist pump buffer tank and method of resist defect reduction
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11747729B2Sep 5, 2023
Semiconductor developer tool and methods of operation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11482417B2Oct 25, 2022
Method of manufacturing semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11181824B2Nov 23, 2021
Semiconductor apparatus and method for baking coating layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11163235B2Nov 2, 2021
Apparatus for forming a photoresist layer, method for forming a masking layer, and method for forming a photoresist layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11048170B2Jun 29, 2021
Apparatus for dispensing liquid material and method for fabricating semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10691020B2Jun 23, 2020
Apparatus for dispensing liquid material and method for fabricating semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US12593390B2Mar 31, 2026
Electrostatic discharge prevention pump
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US12550678B2Feb 10, 2026
Method and device for placing semiconductor wafer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51