Inventor
TSENG WEI-HSIANG
TW14 patents
⚠️ This page may combine multiple inventors who share the name “TSENG WEI-HSIANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
9 patentsUS12191146B2Jan 7, 2025
Method of manufacturing semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11482417B2Oct 25, 2022
Method of manufacturing semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11162777B2Nov 2, 2021
Wafer alignment mark scheme
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11014103B2May 25, 2021
Substrate processing apparatus and substrate processing method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10867872B2Dec 15, 2020
Method and apparatus for manufacturing semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10514247B2Dec 24, 2019
Wafer alignment mark scheme
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9863754B2Jan 9, 2018
Wafer alignment mark scheme
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9640487B2May 2, 2017
Wafer alignment mark scheme
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations51
US12124168B2Oct 22, 2024
Method and apparatus for coating photoresist over a substrate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49