Inventor

YU CHIH-JEN

TW4 patents

⚠️ This page may combine multiple inventors who share the name “YU CHIH-JEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

2 patents

US12199054B2Jan 14, 2025

Method and apparatus for improved wafer coating

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations59

US11081365B2Aug 3, 2021

Treatment to interface between metal film and BARC or photoresist

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57

TAIWAN SEMICONDUCTOR MFG

1 patent

US8683395B2Mar 25, 2014

Method and system for feed-forward advanced process control

TAIWAN SEMICONDUCTOR MFG1 citations47

YU CHIH-JEN

1 patent

US8429569B2Apr 23, 2013

Method and system for feed-forward advanced process control

YU CHIH-JEN1 citations41