Inventor

ICHIKI KAZUYA

JP2 patents

Patents

2 patents

US10115586B2Oct 30, 2018

Method for depositing a planarization layer using polymerization chemical vapor deposition

TOKYO ELECTRON LTD3 citations63

US12051571B2Jul 30, 2024

Substrate processing method and substrate processing system

TOKYO ELECTRON LTD0 citations58