Inventor
MADHIWALA VIRAJ
FI4 patents
Patents
4 patentsUS12148609B2Nov 19, 2024
Silicon oxide deposition method
ASM IP HOLDING BV0 citations61
US12217954B2Feb 4, 2025
Method of cleaning a surface
ASM IP HOLDING BV0 citations60
US12476106B2Nov 18, 2025
Selective deposition of organic material
ASM IP HOLDING BV0 citations59
US12227835B2Feb 18, 2025
Selective deposition of material comprising silicon and oxygen using plasma
ASM IP HOLDING BV0 citations58