Inventor

TOIS EVA

FI41 patents

⚠️ This page may combine multiple inventors who share the name “TOIS EVA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOIS EVA

ASM IP HOLDING BV

Dual selective deposition

Selective deposition of metals, metal oxides, and dielectrics

Passivation against vapor deposition

Dual selective deposition

Selective deposition

Selective layer formation using deposition and removing

Selective deposition of metals, metal oxides, and dielectrics

Selective deposition of metals, metal oxides, and dielectrics

Selective deposition of silicon oxide on metal surfaces

Uniform deposition of SiOC on dielectric and metal surfaces

Simultaneous selective deposition of two different materials on two different surfaces

Selective PEALD of oxide on dielectric

Selective deposition using hydrophobic precursors

Selective deposition of silicon oxide on dielectric surfaces relative to metal surfaces

Selective PEALD of oxide on dielectric

Dual selective deposition

Dual selective deposition

Organic reactants for atomic layer deposition

Methods for thin film deposition

Selective deposition of metals, metal oxides, and dielectrics

Selective deposition of silicon oxide on metal surfaces

Selective deposition using hydrophobic precursors

Organic reactants for atomic layer deposition

Plasma enhanced deposition processes for controlled formation of metal oxide thin films

Apparatuses for thin film deposition

Silicon oxide deposition method

Simultaneous selective deposition of two different materials on two different surfaces

Method of cleaning a surface

Apparatuses for thin film deposition

Selective deposition of organic material

Selective deposition of material comprising silicon and oxygen using plasma

ASM INT

Method of growing oxide thin films

Method of growing oxide thin films

Atomic-layer-chemical-vapor-deposition of films that contain silicon dioxide

Enhanced thin film deposition

ASM INT NV

Enhanced thin film deposition

Enhanced thin film deposition

Enhanced thin film deposition

RAHTU ANTTI

Enhanced thin film deposition

PORE VILJAMI J

Deposition and reduction of mixed metal oxide thin films

TOIS EVA

Method of growing oxide thin films