Inventor
HA SOONMOK
KR9 patents
⚠️ This page may combine multiple inventors who share the name “HA SOONMOK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
7 patentsUS9666434B2May 30, 2017
Method for forming fine patterns of semiconductor device
SAMSUNG ELECTRONICS CO LTD7 citations82
US10096603B2Oct 9, 2018
Method of fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD6 citations71
US9941286B2Apr 10, 2018
Semiconductor devices and methods for manufacturing the same
SAMSUNG ELECTRONICS CO LTD3 citations71
US9099399B2Aug 4, 2015
Methods of forming fine patterns for semiconductor devices
SAMSUNG ELECTRONICS CO LTD6 citations67
US11768432B2Sep 26, 2023
Reflective mask and method for manufacturing a semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations56
US12387933B2Aug 12, 2025
Method for forming photoresist pattern and method for forming pattern on a substrate
SAMSUNG ELECTRONICS CO LTD0 citations55
US11733601B2Aug 22, 2023
EUV photomask and method of forming mask pattern using the same
SAMSUNG ELECTRONICS CO LTD0 citations48