Inventor

DENG SHAOREN

BE18 patents

⚠️ This page may combine multiple inventors who share the name “DENG SHAOREN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DENG SHAOREN

ASM IP HOLDING BV

Selective passivation and selective deposition

Selective deposition of silicon oxide on metal surfaces

Methods for selectively forming a target film on a substrate comprising a first dielectric surface and a second metallic surface

Selective passivation and selective deposition

Selective deposition of metal oxides on metal surfaces

Selective deposition of silicon oxide on dielectric surfaces relative to metal surfaces

Methods for selectively forming a target film on a substrate comprising a first dielectric surface and a second metallic surface

Selective passivation and selective deposition

Selective deposition of silicon oxide on metal surfaces

Selective passivation and selective deposition

Selective passivation and selective deposition

Toposelective vapor deposition using an inhibitor

Selective passivation and selective deposition

Method of cleaning a surface

Selective deposition of organic material

Selective deposition of material comprising silicon and oxygen using plasma

Method and apparatus for forming a patterned structure on a substrate

ASM IP HOLDING B V

Toposelective vapor deposition using an inhibitor