Inventor
CHANDRASEKARAN ANIRUDHAN
US4 patents
Patents
4 patentsUS12217954B2Feb 4, 2025
Method of cleaning a surface
ASM IP HOLDING BV0 citations60
US12476106B2Nov 18, 2025
Selective deposition of organic material
ASM IP HOLDING BV0 citations59
US12227835B2Feb 18, 2025
Selective deposition of material comprising silicon and oxygen using plasma
ASM IP HOLDING BV0 citations58
US12454752B2Oct 28, 2025
Method and apparatus for forming a patterned structure on a substrate
ASM IP HOLDING BV0 citations57