Inventor
HUANG YEN-KAI
CN8 patents
⚠️ This page may combine multiple inventors who share the name “HUANG YEN-KAI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
4 patentsUS9952503B2Apr 24, 2018
Method for repairing a mask
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations49
US9625808B2Apr 18, 2017
Durable metal film deposition for mask repair
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US9759998B2Sep 12, 2017
Efficient solution for removing EUV native defects
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US9395632B2Jul 19, 2016
Efficient solution for removing EUV native defects
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48