Inventor

VANDALON VINCENT

BE2 patents

Patents

2 patents

US12227835B2Feb 18, 2025

Selective deposition of material comprising silicon and oxygen using plasma

ASM IP HOLDING BV0 citations58

US12454752B2Oct 28, 2025

Method and apparatus for forming a patterned structure on a substrate

ASM IP HOLDING BV0 citations57