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Inventor
MAKI MICHIYOSHI
4 patents
⚠️ This page may combine multiple inventors who share the name “MAKI MICHIYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
3 patents
US4276114A
Jun 30, 1981
Semiconductor substrate and a manufacturing method thereof
HITACHI LTD
54 citations
94
US4458703A
Jul 10, 1984
System for cleaning articles
HITACHI LTD
35 citations
89
US4025941A
May 24, 1977
Hall element
HITACHI LTD
14 citations
69
HITACHI PLANT ENG & CONSTR CO
1 patent
US4693173A
Sep 15, 1987
Clean room
HITACHI PLANT ENG & CONSTR CO
37 citations
90