Inventor

O'CONNOR GEOFFREY

US6 patents

⚠️ This page may combine multiple inventors who share the name “O'CONNOR GEOFFREY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML HOLDING NV

3 patents

US10324383B2Jun 18, 2019

Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus

ASML HOLDING NV5 citations79

US7678458B2Mar 16, 2010

Bonding silicon silicon carbide to glass ceramics

ASML HOLDING NV6 citations71

USRE49066EMay 10, 2022

Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus

ASML HOLDING NV0 citations59

SVG LITHOGRAPHY SYSTEMS INC

1 patent

US5285142AFeb 8, 1994

Wafer stage with reference surface

SVG LITHOGRAPHY SYSTEMS INC92 citations94

PERKIN ELMER CORP

1 patent

US4760429AJul 26, 1988

High speed reticle change system

PERKIN ELMER CORP28 citations89

LIPSON MATTHEW

1 patent

US8168017B2May 1, 2012

Bonding silicon silicon carbide to glass ceramics

LIPSON MATTHEW2 citations58