Inventor
OUTSUKA KAZUHITO
JP5 patents
Patents
5 patentsUS4814829AMar 21, 1989
Projection exposure apparatus
CANON KK162 citations98
US5925887AJul 20, 1999
Projection exposure apparatus including an optical characteristic detector for detecting a change in optical characteristic of a projection optical system and device manufacturing method using the same
CANON KK50 citations92
US6714691B2Mar 30, 2004
Exposure method and apparatus, and device manufacturing method using the same
CANON KK20 citations90
US6608667B2Aug 19, 2003
Exposure apparatus and device manufacturing method
CANON KK9 citations72
US6909372B2Jun 21, 2005
Power monitoring unit, control method therefor, and exposure apparatus
CANON KK7 citations69