Inventor
OLASUPO KOLAWOLE R
US3 patents
Patents
3 patentsUS5026666AJun 25, 1991
Method of making integrated circuits having a planarized dielectric
AT & T BELL LAB63 citations93
US5326727AJul 5, 1994
Method for integrated circuit fabrication including linewidth control during etching
AT & T BELL LAB11 citations72
US5268332ADec 7, 1993
Method of integrated circuit fabrication having planarized dielectrics
AT & T BELL LAB6 citations57