Inventor
OKU TAIZO
JP5 patents
Patents
5 patentsUS6500752B2Dec 31, 2002
Semiconductor device and semiconductor device manufacturing method
CANON SALES CO INC21 citations91
US6420276B2Jul 16, 2002
Semiconductor device and semiconductor device manufacturing method
CANON SALES CO INC18 citations91
US6835669B2Dec 28, 2004
Film forming method, semiconductor device and semiconductor device manufacturing method
CANON SALES CO INC6 citations61
US6472330B1Oct 29, 2002
Method for forming an interlayer insulating film, and semiconductor device
CANON SALES CO INC3 citations61
US6646327B2Nov 11, 2003
Semiconductor device and semiconductor device manufacturing method
CANON SALES CO INC4 citations60