Inventor
LIAO KUO-HUNG
TW8 patents
⚠️ This page may combine multiple inventors who share the name “LIAO KUO-HUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
5 patentsUS6060992AMay 9, 2000
Method and apparatus for tracking mobile work-in-process parts
TAIWAN SEMICONDUCTOR MFG80 citations95
US6221791B1Apr 24, 2001
Apparatus and method for oxidizing silicon substrates
TAIWAN SEMICONDUCTOR MFG42 citations90
US6849131B2Feb 1, 2005
Truncated dummy plate for process furnace
TAIWAN SEMICONDUCTOR MFG36 citations89
US6358328B1Mar 19, 2002
Method for dry cleaning a wafer container
TAIWAN SEMICONDUCTOR MFG18 citations79
US6468354B2Oct 22, 2002
Semiconductor wafer support
TAIWAN SEMICONDUCTOR MFG5 citations62