Inventor
CHOE KWANG SU
US5 patents
Patents
5 patentsUS6878611B2Apr 12, 2005
Patterned strained silicon for high performance circuits
IBM29 citations92
US6800518B2Oct 5, 2004
Formation of patterned silicon-on-insulator (SOI)/silicon-on-nothing (SON) composite structure by porous Si engineering
IBM44 citations92
US7566482B2Jul 28, 2009
SOI by oxidation of porous silicon
IBM13 citations83
US7125458B2Oct 24, 2006
Formation of a silicon germanium-on-insulator structure by oxidation of a buried porous silicon layer
IBM17 citations83
US7718231B2May 18, 2010
Thin buried oxides by low-dose oxygen implantation into modified silicon
IBM8 citations82