Inventor
STEEGEN AN
US5 patents
Patents
5 patentsUS7056794B2Jun 6, 2006
FET gate structure with metal gate electrode and silicide contact
IBM96 citations96
US7029966B2Apr 18, 2006
Process options of forming silicided metal gates for advanced CMOS devices
IBM53 citations95
US7326610B2Feb 5, 2008
Process options of forming silicided metal gates for advanced CMOS devices
IBM34 citations92
US6876040B1Apr 5, 2005
Dense SRAM cells with selective SOI
IBM8 citations73
US6974736B2Dec 13, 2005
Method of forming FET silicide gate structures incorporating inner spacers
IBM10 citations72