Inventor
HU XUERANG
US51 patents
⚠️ This page may combine multiple inventors who share the name “HU XUERANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
44 patentsUS10879031B2Dec 29, 2020
Apparatus of plural charged-particle beams
ASML NETHERLANDS BV30 citations98
US10395886B2Aug 27, 2019
Apparatus of plural charged-particle beams
ASML NETHERLANDS BV16 citations94
US10541110B2Jan 21, 2020
Apparatus of plural charged-particle beams
ASML NETHERLANDS BV5 citations84
US11804356B2Oct 31, 2023
Apparatus using multiple beams of charged particles
ASML NETHERLANDS BV2 citations73
US11705304B2Jul 18, 2023
Apparatus of plural charged-particle beams
ASML NETHERLANDS BV2 citations73
US11594396B2Feb 28, 2023
Multi-beam inspection apparatus with single-beam mode
ASML NETHERLANDS BV2 citations73
US11469074B2Oct 11, 2022
Multiple charged-particle beam apparatus with low crosstalk
ASML NETHERLANDS BV3 citations73
US11398368B2Jul 26, 2022
Apparatus of plural charged-particle beams
ASML NETHERLANDS BV1 citations73
US11289304B2Mar 29, 2022
Apparatus using multiple beams of charged particles
ASML NETHERLANDS BV3 citations73
US11282675B2Mar 22, 2022
Multi-beam inspection apparatus with improved detection performance of signal electrons
ASML NETHERLANDS BV2 citations73
US11232928B2Jan 25, 2022
Multi-beam inspection apparatus
ASML NETHERLANDS BV2 citations73
US11222766B2Jan 11, 2022
Multi-cell detector for charged particles
ASML NETHERLANDS BV4 citations73
US11062877B2Jul 13, 2021
Apparatus of plural charged-particle beams
ASML NETHERLANDS BV1 citations73
US10892138B2Jan 12, 2021
Multi-beam inspection apparatus with improved detection performance of signal electrons
ASML NETHERLANDS BV3 citations73
US10811222B2Oct 20, 2020
Apparatus of plural charged-particle beams
ASML NETHERLANDS BV1 citations73
US12211669B2Jan 28, 2025
Multiple charged-particle beam apparatus with low crosstalk
ASML NETHERLANDS BV3 citations71
US12243709B2Mar 4, 2025
Apparatus using multiple charged particle beams
ASML NETHERLANDS BV0 citations63
US12237143B2Feb 25, 2025
Apparatus of plural charged-particle beams
ASML NETHERLANDS BV0 citations63
US12237144B2Feb 25, 2025
Apparatus using multiple beams of charged particles
ASML NETHERLANDS BV0 citations63
US12142453B2Nov 12, 2024
Multi-beam inspection apparatus
ASML NETHERLANDS BV0 citations63
US11961697B2Apr 16, 2024
Apparatus using charged particle beams
ASML NETHERLANDS BV0 citations63
US11887807B2Jan 30, 2024
Apparatus of plural charged-particle beams
ASML NETHERLANDS BV0 citations63
USRE49784EJan 2, 2024
Apparatus of plural charged-particle beams
ASML NETHERLANDS BV0 citations63
US11721521B2Aug 8, 2023
Multi-beam inspection apparatus with improved detection performance of signal electrons
ASML NETHERLANDS BV0 citations63
US11676793B2Jun 13, 2023
Apparatus of plural charged particle beams
ASML NETHERLANDS BV1 citations63
US11670477B2Jun 6, 2023
Apparatus using charged particle beams
ASML NETHERLANDS BV0 citations63
US11587758B2Feb 21, 2023
Apparatus of plural charged-particle beams
ASML NETHERLANDS BV0 citations63
US11538655B2Dec 27, 2022
Multi-beam inspection apparatus
ASML NETHERLANDS BV0 citations63
US11062874B2Jul 13, 2021
Apparatus using multiple charged particle beams
ASML NETHERLANDS BV0 citations63
US12424408B2Sep 23, 2025
Apparatus of plural charged-particle beams
ASML NETHERLANDS BV0 citations62
US12191109B2Jan 7, 2025
Sample pre-charging methods and apparatuses for charged particle beam inspection
ASML NETHERLANDS BV0 citations62
US12033830B2Jul 9, 2024
Multiple charged-particle beam apparatus with low crosstalk
ASML NETHERLANDS BV1 citations62
US11784024B2Oct 10, 2023
Multi-cell detector for charged particles
ASML NETHERLANDS BV0 citations62
US11676792B2Jun 13, 2023
Sample pre-charging methods and apparatuses for charged particle beam inspection
ASML NETHERLANDS BV0 citations62
US12469668B2Nov 11, 2025
Systems and methods for compensating dispersion of a beam separator in a single-beam or multi-beam apparatus
ASML NETHERLANDS BV0 citations61
US12463010B2Nov 4, 2025
Multiple charged-particle beam apparatus and methods
ASML NETHERLANDS BV0 citations60
US11854765B2Dec 26, 2023
Multiple charged-particle beam apparatus and methods
ASML NETHERLANDS BV0 citations60
US12080515B2Sep 3, 2024
Apparatus for multiple charged-particle beams
ASML NETHERLANDS BV0 citations59
US11302514B2Apr 12, 2022
Apparatus for multiple charged-particle beams
ASML NETHERLANDS BV1 citations59
US12347643B2Jul 1, 2025
Multiple charged-particle beam apparatus and methods of operating the same using movable lenses
ASML NETHERLANDS BV0 citations52
US12278081B2Apr 15, 2025
System and method for alignment of secondary beams in multi-beam inspection apparatus
ASML NETHERLANDS BV0 citations52
US10879032B2Dec 29, 2020
Multi-beam inspection apparatus
ASML NETHERLANDS BV0 citations52
US11614416B2Mar 28, 2023
System and method for aligning electron beams in multi-beam inspection apparatus
ASML NETHERLANDS BV0 citations50
US11961698B2Apr 16, 2024
Replaceable module for a charged particle apparatus
ASML NETHERLANDS BV0 citations44
HERMES MICROVISION INC
5 patentsUS10141160B2Nov 27, 2018
Apparatus of plural charged-particle beams
HERMES MICROVISION INC42 citations98
US9922799B2Mar 20, 2018
Apparatus of plural charged-particle beams
HERMES MICROVISION INC64 citations98
US10062541B2Aug 28, 2018
Apparatus of plural charged-particle beams
HERMES MICROVISION INC34 citations94
US9105440B2Aug 11, 2015
Apparatus of plural charged particle beams with multi-axis magnetic lens
HERMES MICROVISION INC5 citations73
US11328894B2May 10, 2022
Systems and methods for compensating dispersion of a beam separator in a single-beam or multi-beam apparatus
HERMES MICROVISION INC1 citations61
HERMES-MICROVISION INC
1 patentShowing the top 50 of 51 patents by PatentIndex Score.