Inventor
MATSUI HIDEFUMI
JP15 patents
⚠️ This page may combine multiple inventors who share the name “MATSUI HIDEFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
9 patentsUS6617095B2Sep 9, 2003
Evaluating method of hydrophobic process, forming method of resist pattern, and forming system of resist pattern
TOKYO ELECTRON LTD21 citations91
US6875466B2Apr 5, 2005
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD14 citations83
US6485203B2Nov 26, 2002
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD17 citations83
US7401988B2Jul 22, 2008
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD7 citations73
US7208066B2Apr 24, 2007
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD7 citations73
US8945313B2Feb 3, 2015
Vacuum exhaust method and a substrate processing apparatus therefor
TOKYO ELECTRON LTD2 citations62
US12211676B2Jan 28, 2025
Measurement system, measurement method, and plasma processing device
TOKYO ELECTRON LTD0 citations61
US12442635B2Oct 14, 2025
Substrate processing apparatus, substrate processing method, and storage medium
TOKYO ELECTRON LTD0 citations48
US12498276B2Dec 16, 2025
Process estimation system, process data estimation method, and recording medium
TOKYO ELECTRON LTD0 citations45