Inventor
HIGUCHI FUMIHIKO
US7 patents
⚠️ This page may combine multiple inventors who share the name “HIGUCHI FUMIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS5411631AMay 2, 1995
Dry etching method
TOKYO ELECTRON LTD66 citations95
US5560804AOct 1, 1996
Etching method for silicon containing layer
TOKYO ELECTRON LTD19 citations91
US5554249ASep 10, 1996
Magnetron plasma processing system
TOKYO ELECTRON LTD30 citations90
US7527016B2May 5, 2009
Plasma processing apparatus
TOKYO ELECTRON LTD16 citations82
US5314573AMay 24, 1994
Dry etching polysilicon using a bromine-containing gas
TOKYO ELECTRON LTD17 citations72
US7192532B2Mar 20, 2007
Dry etching method
TOKYO ELECTRON LTD0 citations50