Inventor

IWAMA NOBUHIRO

JP3 patents

⚠️ This page may combine multiple inventors who share the name “IWAMA NOBUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US7527016B2May 5, 2009

Plasma processing apparatus

TOKYO ELECTRON LTD16 citations82

US7709397B2May 4, 2010

Method and system for etching a high-k dielectric material

TOKYO ELECTRON LTD1 citations50

YAMAZAWA YOHEI

1 patent

US8251011B2Aug 28, 2012

Plasma processing apparatus

YAMAZAWA YOHEI13 citations82