Inventor

HIGASHIURA TSUTOMU

JP5 patents

⚠️ This page may combine multiple inventors who share the name “HIGASHIURA TSUTOMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

4 patents

US7527016B2May 5, 2009

Plasma processing apparatus

TOKYO ELECTRON LTD16 citations82

US7025857B2Apr 11, 2006

Plasma treatment apparatus, matching box, impedance matching device, and coupler

TOKYO ELECTRON LTD9 citations69

US7244475B2Jul 17, 2007

Plasma treatment apparatus and control method thereof

TOKYO ELECTRON LTD4 citations58

US7682982B2Mar 23, 2010

Plasma processing apparatus and control method thereof

TOKYO ELECTRON LTD0 citations36

YAMAZAWA YOHEI

1 patent

US8251011B2Aug 28, 2012

Plasma processing apparatus

YAMAZAWA YOHEI13 citations82