Inventor
DOERK GREGORY S
US5 patents
Patents
5 patentsUS9107291B2Aug 11, 2015
Formation of a composite pattern including a periodic pattern self-aligned to a prepattern
IBM13 citations83
US9738765B2Aug 22, 2017
Hybrid topographical and chemical pre-patterns for directed self-assembly of block copolymers
IBM4 citations71
US9691615B2Jun 27, 2017
Chemoepitaxy-based directed self assembly process with tone inversion for unidirectional wiring
IBM1 citations51
US9514263B1Dec 6, 2016
Chemo epitaxy mask generation
IBM0 citations51
US10037398B2Jul 31, 2018
Pattern decomposition method for wiring patterns with chemoepitaxy based directed self assembly
IBM0 citations41