Inventor

Goda Kazuya

JP3 patents

⚠️ This page may combine multiple inventors who share the name “Goda Kazuya”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US10046372B2Aug 14, 2018

Liquid processing apparatus

TOKYO ELECTRON LTD4 citations68

US12424459B2Sep 23, 2025

Substrate processing apparatus and substrate processing method

TOKYO ELECTRON LTD0 citations45

ZEON CORP

1 patent

US10288931B2May 14, 2019

LCD device

ZEON CORP0 citations36