Inventor
CHEN YULU
US7 patents
Patents
7 patentsUS9478462B1Oct 25, 2016
SAV using selective SAQP/SADP
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US9484258B1Nov 1, 2016
Method for producing self-aligned vias
GLOBALFOUNDRIES INC21 citations91
US9911604B1Mar 6, 2018
Sidewall spacer pattern formation method
GLOBALFOUNDRIES INC10 citations83
US10332745B2Jun 25, 2019
Dummy assist features for pattern support
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US10564554B2Feb 18, 2020
System and method for analyzing printed masks for lithography based on representative contours
GLOBALFOUNDRIES INC0 citations41
US10802393B2Oct 13, 2020
Extreme ultraviolet (EUV) lithography mask
GLOBALFOUNDRIES INC0 citations39
US10468149B2Nov 5, 2019
Extreme ultraviolet mirrors and masks with improved reflectivity
GLOBALFOUNDRIES INC0 citations39