Inventor
Verduijn Erik
US4 patents
Patents
4 patentsUS9478462B1Oct 25, 2016
SAV using selective SAQP/SADP
GLOBALFOUNDRIES INC31 citations92
US9484258B1Nov 1, 2016
Method for producing self-aligned vias
GLOBALFOUNDRIES INC21 citations91
US10332745B2Jun 25, 2019
Dummy assist features for pattern support
GLOBALFOUNDRIES INC0 citations50
US10802393B2Oct 13, 2020
Extreme ultraviolet (EUV) lithography mask
GLOBALFOUNDRIES INC0 citations39