Inventor
SEO HOON-SEOK
KR13 patents
Patents
13 patentsUS11037872B2Jun 15, 2021
Semiconductor devices and methods of manufacturing the same
SAMSUNG ELECTRONICS CO LTD2 citations73
US11569128B2Jan 31, 2023
Semiconductor device
SAMSUNG ELECTRONICS CO LTD3 citations72
US10943824B2Mar 9, 2021
Semiconductor device and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD1 citations72
US10497649B2Dec 3, 2019
Integrated circuit device and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD2 citations72
US10276505B2Apr 30, 2019
Integrated circuit device and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD5 citations72
US10535600B2Jan 14, 2020
Semiconductor device
SAMSUNG ELECTRONICS CO LTD2 citations71
US12243777B2Mar 4, 2025
Semiconductor device and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD0 citations62
US11823952B2Nov 21, 2023
Semiconductor device and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD0 citations62
US11600569B2Mar 7, 2023
Integrated circuit device and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD0 citations62
US11049810B2Jun 29, 2021
Integrated circuit device and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD0 citations62
US11876017B2Jan 16, 2024
Integrated circuit devices including enlarged via and fully aligned metal wire and methods of forming the same
SAMSUNG ELECTRONICS CO LTD0 citations59
US11232986B2Jan 25, 2022
Integrated circuit devices including enlarged via and fully aligned metal wire and methods of forming the same
SAMSUNG ELECTRONICS CO LTD0 citations59
US10916437B2Feb 9, 2021
Methods of forming micropatterns and substrate processing apparatus
SAMSUNG ELECTRONICS CO LTD0 citations51