Inventor
BATISTAKIS CHRYSOSTOMOS
NL6 patents
Patents
6 patentsUS12586170B2Mar 24, 2026
System and method for generating predictive images for wafer inspection using machine learning
ASML NETHERLANDS BV1 citations61
US11880640B2Jan 23, 2024
Systems and methods for predicting layer deformation
ASML NETHERLANDS BV0 citations61
US11625520B2Apr 11, 2023
Systems and methods for predicting layer deformation
ASML NETHERLANDS BV0 citations61
US11914942B2Feb 27, 2024
Method for predicting resist deformation
ASML NETHERLANDS BV0 citations54
US11709988B2Jul 25, 2023
Method for predicting resist deformation
ASML NETHERLANDS BV1 citations54
US12567164B2Mar 3, 2026
Apparatus and method for determining three dimensional data based on an image of a patterned substrate
ASML NETHERLANDS BV0 citations46