Inventor
FISHER KIRK ALLEN
US8 patents
Patents
8 patentsUS12180611B2Dec 31, 2024
Methods of forming silicon carbide coated base substrates at multiple temperatures
APPLIED MATERIALS INC0 citations59
US11827999B2Nov 28, 2023
Methods of forming silicon carbide coated base substrates at multiple temperatures
APPLIED MATERIALS INC0 citations59
US12479776B2Nov 25, 2025
Process for manufacturing a silicon carbide coated body
APPLIED MATERIALS INC0 citations56
US12077441B2Sep 3, 2024
Process for manufacturing a silicon carbide coated body
APPLIED MATERIALS INC0 citations56
US11851753B2Dec 26, 2023
Process for manufacturing a silicon carbide coated body
APPLIED MATERIALS INC0 citations56
US12584240B2Mar 24, 2026
Low mass substrate support
APPLIED MATERIALS INC0 citations46
US12497697B2Dec 16, 2025
Layer with discrete islands formed on a substrate support
APPLIED MATERIALS INC0 citations45
US12534798B2Jan 27, 2026
Method of coating a chamber component
APPLIED MATERIALS INC0 citations41