Inventor

LIANG YICHEN

US3 patents

Patents

3 patents

US11972948B2Apr 30, 2024

Adhesion layers for EUV lithography

BREWER SCIENCE INC2 citations67

US12437993B2Oct 7, 2025

Adhesion layers for EUV lithography

BREWER SCIENCE INC0 citations56

US11361967B2Jun 14, 2022

Underlayers for EUV lithography

BREWER SCIENCE INC0 citations47