Inventor
OHSAWA TETSU
JP8 patents
Patents
8 patentsUS6033215AMar 7, 2000
Heat treatment apparatus and heat treatment boat
TOKYO ELECTRON LTD325 citations98
US5464313ANov 7, 1995
Heat treating apparatus
TOKYO ELECTRON LTD510 citations98
US5064337ANov 12, 1991
Handling apparatus for transferring carriers and a method of transferring carriers
TOKYO ELECTRON LTD485 citations98
US5586880ADec 24, 1996
Heat treatment apparatus and heat treatment boat
TOKYO ELECTRON LTD51 citations95
US5540098AJul 30, 1996
Transfer device
TOKYO ELECTRON LTD64 citations95
US5407181AApr 18, 1995
Vertical heat treating device
TOKYO ELECTRON LTD38 citations92
US5645419AJul 8, 1997
Heat treatment method and device
TOKYO ELECTRON LTD31 citations91
US5433784AJul 18, 1995
Vertical treating apparatus having a restricting means for avoiding misalignment
TOKYO ELECTRON LTD38 citations91